The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 20, 2001
Filed:
Mar. 30, 1999
Yoshihide Senzaki, Carlsbad, CA (US);
Arthur Kenneth Hochberg, Solana Beach, CA (US);
John Anthony Thomas Norman, Encinitas, CA (US);
Air Products and Chemicals, Inc., Allentown, PA (US);
Abstract
A method for producing a tantalum nitride layer on a substrate, comprising; directly injecting a liquid mixture of (R,R,N),Ta(═NR,) and (R,R,N),Ta[&eegr;,—R,N═C (R,)(R,)] into a dispersing zone followed by delivering the dispersed mixture into a reactor containing the substrate at elevated temperature and reacting the mixture with a source of nitrogen selected from the group consisting of ammonia, alkyl amines, N,H,, alkyl hydrazine, N,and mixtures thereof, to produce the tantalum nitride layer on the substrate, where R,, R,, R,, R,, R,, R,, R,and R,are individually C,alkyl, aryl or hydrogen.