The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 20, 2001
Filed:
Nov. 05, 1999
Applicant:
Inventors:
David Ian Flynn, Tunbridge Wells, GB;
Xu Shi, Singapore, SG;
Hong Siang Tan, Selangor, MY;
Beng Kang Tay, Singapore, SG;
Assignee:
Filplas Vacuum Technology PTE, Ltd., Singapore, SG;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 1/432 ;
U.S. Cl.
CPC ...
C23C 1/432 ;
Abstract
A coating of positive ions is applied to a substrate by generating an arc at a cathode, directing a beam of ions emitted from the cathode to the substrate via a filter path to remove macroparticles, igniting the arc by moving an arc ignition from a retracted position to an ignition position in which cathode contact is made, and storing the position in which arc ignition occurred.