The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 20, 2001
Filed:
Jan. 20, 1998
Applicant:
Inventors:
Takashi Hiraga, Tsukuba, JP;
Tetsuo Moriya, Tsukuba, JP;
Norio Tanaka, Tokyo, JP;
Hiromitsu Yanagimoto, Tokyo, JP;
Assignee:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B05C 1/100 ; C23C 1/422 ; B05B 1/00 ; B05D 5/12 ; H05B 6/06 ;
U.S. Cl.
CPC ...
B05C 1/100 ; C23C 1/422 ; B05B 1/00 ; B05D 5/12 ; H05B 6/06 ;
Abstract
A thin-film fabrication method includes a spray step in which at least one thin-film composition material in liquid form is sprayed into a vacuum vessel via a spray nozzle provided for each thin-film composition material and deposited on a substrate, and a heat treatment step in which the material deposited on the substrate is heat treated. The substrate temperature in the spray step and/or the heat treatment step is controlled within a prescribed temperature range.