The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 13, 2001
Filed:
Jul. 06, 2000
Kumiko Matsui, Yokohama, JP;
Nikon Corporation, Tokyo, JP;
Abstract
An interference microscope includes an illumination optical system for making two light beams fall on a subject, an observation optical system for forming an interference image by causing interference between the two light beams from the subject, a detection unit for detecting the interference image, and a calculation unit for calculating a phase difference between the two light beams from a result of the detection by the detection unit. The two light beams contain light having a plurality of wavelengths. The detection unit detects light intensities with respect to the light having the plurality of wavelengths that is contained in the interference image. The calculation unit obtains such a wavelength as to minimize the light intensity from the light intensities of the light having the plurality of wavelengths which are detected by the detection unit, and sets, as the phase difference, a magnitude of the obtained wavelength.