The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 13, 2001

Filed:

Nov. 05, 1999
Applicant:
Inventor:

John C. Tsai, Saratoga, CA (US);

Assignee:

Excel Precision Corp., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01D 5/34 ; G01B 9/02 ;
U.S. Cl.
CPC ...
G01D 5/34 ; G01B 9/02 ;
Abstract

A position determining system (,) particularly useful for translation and rotation measurement. The position of a stage (,) is optically detected using light beams (,) and sensors (,) in a detection section (,). In a control section (,), electronic processing using amplifiers (,), phase-sensitive synchronous demodulators (,), and filters (,) then produces position signals (,) which a logic unit (,) processes into a results signal (,) which is communicated via a communications link (,) to an external system (,). The external system (,) may then display the measurement results for a human user or use them as feedback to control movement of the stage (,). Optionally, the external system (,) may send instruction signals (,) via the communications link (,) to the logic unit (,) to control the operation of the position determining system (,).


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