The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 13, 2001
Filed:
Oct. 26, 2000
Mona M. Eissa, Plano, TX (US);
Troy A. Yocum, Plano, TX (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
A post laser blown fuse slag etch for a copper fuse (,) with a barrier metal liner (,), (e.g., Ta,N,, Ta, Ti, Ti,N,). After the fuse (,) is blown, copper and copper complexes may be selectively removed using a nitric acid and H,O,solution. Then, a corrosion inhibitor is used to passivate the surface of exposed copper (,). Next, the barrier metal (,) of slag (,) is removed using a strong basic etch chemistry comprising a base plus H,O,. This solution removes the barrier metal selectively with respect to passivation layer (e.g., silicon nitride) (,) and oxides/FSG (,). A diluted HF solution may then be used to remove any trace metal or oxidized copper.