The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 13, 2001
Filed:
Jan. 25, 2000
Applicant:
Inventors:
Takayuki Suzuki, Otsu, JP;
Hitoshi Nishio, Otsu, JP;
Assignee:
Kaneka Corporation, Osaka, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 1/434 ;
U.S. Cl.
CPC ...
C23C 1/434 ;
Abstract
A method of depositing a thin film of metal oxide by a magnetron sputtering apparatus with a mobile magnet for creating a magnetic field reciprocating across a film deposition region, is characterized in that the magnet reciprocates no more than twice in depositing a single thin film of metal oxide.