The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 06, 2001
Filed:
Oct. 08, 1998
Sung-geun Kim, Suwon, KR;
Byung-wan Kim, Suwon, KR;
Abstract
A method for controlling semiconductor fabricating equipment includes receiving at a maintenance module in a host computer first maintenance data generated from semiconductor fabricating equipment. A value of the first data is compared with a predesignated first reference threshold at the maintenance module. A warning message is displayed on a display device, if the value of the first data is not less than the first reference threshold. If the value of the first data is not less than the first reference threshold, second maintenance data is received, and it is determined whether maintenance of the fabricating equipment occurred. If not, the value of the second data is compared with a predesignated second reference threshold at the maintenance module. If the value of the second data is not less than the second reference threshold, the fabricating equipment is interlocked by the maintenance module, and the fabricating equipment is stopped.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile