The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 06, 2001
Filed:
Sep. 01, 1999
Applicant:
Inventor:
Philip John Cacharelis, Menlo Park, CA (US);
Assignee:
National Semiconductor Corporation, Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02F 1/13 ;
U.S. Cl.
CPC ...
G02F 1/13 ;
Abstract
A process flow for forming a pixel cell for a light valve implements the furnace alloy/sintering step prior to deposition of the reflective metal layer from which the active pixel electrodes are to be formed. In this manner, the active pixel electrodes are spared loss of reflectance associated with prolonged exposure to high temperatures of the furnace alloy/sintering step. Adequate suppression of surface state charges created after the furnace alloy/sintering is ensured by performing a rapid thermal anneal at the conclusion of the process flow.