The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 06, 2001
Filed:
Aug. 27, 1999
Applicant:
Inventor:
Kenji Tsuboi, Oumihachiman, JP;
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C11D 1/22 ; C11D 3/43 ;
U.S. Cl.
CPC ...
C11D 1/22 ; C11D 3/43 ;
Abstract
A cleaning composition which includes a surfactant containing a phenyl group, a sulfonated aromatic compound, and water is prepared. The cleaning composition is especially useful for effectively removing deposited contaminants adhered mainly to a resist developing apparatus. Further, a derivative of aliphatic carboxylic acid and/or acetic ester can be added to the composition, as required. The cleaning composition is used mainly to clean a resist developing apparatus.