The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 06, 2001
Filed:
Feb. 12, 1998
Applicant:
Inventors:
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B 1/510 ;
U.S. Cl.
CPC ...
B32B 1/510 ;
Abstract
A multilayered wiring layer having high thermal stability, high stress migration resistance and low electrical resistance. The wiring layer includes at least two layers formed on a substrate wherein each layer has substantially the same component and wherein the relationship between grain size and thickness of each of the at least two layers is 0.5<d/h<2, wherein d is the grain size of each layer and h is the thickness of each layer.