The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 06, 2001
Filed:
Sep. 21, 1998
Hans Quaderer, Liechtenstein, LI;
Juergen Weichart, Liechtenstein, LI;
Unaxis Balzers Aktiengesellschaft, Fuerstentum, LI;
Abstract
A ferromagnetic magnetron target contains a pattern of blind holes with a circular cross-section distributed along a sputtering surface thereof. A process produces the target for a given magnetron source with a given tunnel field and includes determining and storing the tunnel field course when individual blind holes are provided in a new target surface, additively superimposing the determined tunnel field course of plural individual blind holes, comparing the resulting tunnel field course with a DESIRED tunnel field course; and changing, as a function of the comparison result, the relative parameter position of one or more of the individual blind holes, or the like to control the working of blind holes into the plane target sputtering surface. An arrangement produces a target from a ferromagnetic material for a given magnetron source with a given tunnel field, with a course addition unit which is operatively connected on the input side of the input unit and which, on the output side, leads to one input of a course comparison unit, at whose second input a desired course can be fed and whose output feeds back to the adjusting inputs at the input unit. The adjusting inputs are operatively connected with an output for the triggering of a blind hole production device for the target.