The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 30, 2001
Filed:
Jun. 02, 2000
Applicant:
Inventor:
Takao Kanehara, Tokyo, JP;
Assignee:
Oki Electric Industry Co., Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/100 ;
U.S. Cl.
CPC ...
H01L 2/100 ;
Abstract
A perovskite crystallized ferroelectric substance is formed over a lower electrode. A precursor solution, which serves as a ferroelectric film, is applied thereto and dried, followed by low-temperature anneal under the condition of a perovskite crystallization temperature or lower. Further, an upper electrode is formed and thereafter subjected to high-temperature anneal at a temperature of the perovskite crystallization temperature or higher to thereby perfectly crystallize the ferroelectric film, whereby a semiconductor element interposed between the electrodes can be formed.