Method of manufacturing an electronic device comprising two layers of organic-containing material

Abstract

A method of manufacturing an electronic device with two layers of organic-containing material which enables a structure with well-defined dimensions to be made in the layers of organic-containing material. This is accomplished through a series of steps of applying a first layer of organic-containing material to a substrate, covering the it with a first layer of inorganic material, applying a second distinct layer of inorganic material, providing a first mask layer of resist having first openings, and etching through the second layer of inorganic material at the first openings using an etch process where the second inorganic material is selectively etched with respect to the first inorganic material. The first mask layer of resist is removed, and etching is performed through the first layer of inorganic material at the location of the first openings. A second layer of organic-containing material is applied and is covered with a third layer of inorganic material. A fourth layer of distinct inorganic material is applied, and a second mask layer of resist having second openings is provided. Etching takes place through the fourth layer of inorganic material at the second openings using an etch process where the fourth inorganic material is selectively etched with respect to the third inorganic material. The second mask layer of resist is removed, and etching through the third layer of inorganic material at the second openings takes place.