The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 30, 2001

Filed:

Jul. 22, 1998
Applicant:
Inventors:

Masahiro Nakamura, Kashiba, JP;

Takuya Yokoyama, Takatsuki, JP;

Tsutomu Nishio, Kashiwara, JP;

Assignee:

Chugai RO Co., Ltd., Osaka, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05D 1/26 ;
U.S. Cl.
CPC ...
B05D 1/26 ;
Abstract

A substrate is placed on a support surface of a table. The support surface has a flatness of 2 &mgr;m or less. The table has a plurality of holes in the surface. A vacuum is created in the holes to bring the substrate into close contact with the support surface. This eliminates deformations of the substrate, such as twisting and curving. A coating die is moved above the table to apply a coating material onto the substrate. Consequently, a coating having a constant thickness is formed on the substrate.


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