The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 30, 2001
Filed:
Sep. 03, 1998
Applicant:
Inventors:
James Elliot Joyce, Bedford, NY (US);
Thomas John Hunt, Peekskill, NY (US);
Paul Sandford Gilman, Suffenn, NY (US);
Assignee:
Praxair S.T. Technology, Inc., North Haven, CT (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 1/414 ;
U.S. Cl.
CPC ...
C23C 1/414 ;
Abstract
A method is provided for achieving an enhanced finish on a sputter target surface that results in good film uniformity, low particle counts, and little to no bum-in time. The method involves chemically etching the surface of the sputter target by immersing the surface one or more times in an etching solution, with intermediate rinsing steps. The result is a surface substantially free of mechanical deformation that exhibits a surface similar to a sputtered target with a surface roughness of 10-30 &mgr;in.