The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 30, 2001
Filed:
Sep. 15, 1998
Applicant:
Inventors:
Hanns Wochner, Burghausen, DE;
Theresia Bauer, Burgkirchen, DE;
Josef Dietl, Neuötting, DE;
Werner Ott, Tann, DE;
Herbert Pichler, Ach, AT;
Wilhelm Schmidbauer, Emmerting, DE;
Dieter Seifert, Neuötting, DE;
Susanne Weizbauer, Rosenheim, DE;
Assignee:
Wacker-Chemie GmbH, Munich, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23G 1/02 ; B08B 3/08 ;
U.S. Cl.
CPC ...
C23G 1/02 ; B08B 3/08 ;
Abstract
Semiconductor material has a low metal concentration at the surface. The semiconductor material has an iron content and/or chromium content on the surface of less than 6.66×10,g/cm,. A method for producing this semiconductor material includes a preliminary cleaning, a main cleaning and hydrophilization. A device for use in this method has a container with pyramid-shaped recesses at the bottom.