The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 23, 2001
Filed:
Jan. 04, 1999
Lawrence James Dungan, Santa Clara, CA (US);
Leon Han, San Jose, CA (US);
Advanced Micro Devices, Inc., Sunnyvale, CA (US);
Abstract
Waste slurry containing dissolved metal from e.g., CMP is subjected to sludge-free processing. Embodiments include separating the waste slurry with a solids filter into a solids-free dissolved metal-containing liquid filtrate portion and a concentrated solids-containing portion, removing the dissolved metal from the filtrate by means of an ion exchanger, back-washing the concentrated solids-containing portion with metal-free effluent from the ion exchanger to further reduce its dissolved metal content, discharging the washed concentrated solids-containing portion to a waste drain, removing the metal from the ion exchanger in solution form, and optionally extracting solid metal from the solution by electrowinning.