The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 23, 2001
Filed:
Feb. 24, 1999
Trace L. Boyd, San Jose, CA (US);
Eric A. Terbeek, Fremont, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A transport chamber implemented to retrieve a substrate from at least one storage facility that is external to the transport chamber and transition the substrate into at least one processing chamber that is external to the transport chamber is provided. The transport chamber includes a bottom plate having an inner surface that is configured to accept a first O-ring. Further provided is a chamber housing that is defined from a rolled forging. The chamber housing has a top surface, and a bottom surface that is designed to join with the inner surface of the bottom plate such that the first O-ring seal forms a seal. The top surface of the chamber housing is suited to accept a second O-ring seal fastened to the perimeter of the top surface of the chamber housing. The transport chamber further includes a top plate that is configured to sit over the second O-ring seal and thereby form a seal over the top surface of the chamber housing.