The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 16, 2001
Filed:
Feb. 17, 2000
Applicant:
Inventors:
Edward Joseph Flynn, Summit, NJ (US);
Jerome Levkoff, Sinking Spring, PA (US);
John William Stayt, Jr., Schnecksville, PA (US);
Frank Stephen Walters, Kutztown, PA (US);
Assignee:
Lucent Technologies Inc., Murray Hill, NJ (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 1/100 ;
U.S. Cl.
CPC ...
G01B 1/100 ;
Abstract
A precision grating period measurement system uses a pair of properly positioned photodetectors to provide sub-Angstrom resolution. That is, the absolute position of a first detector with respect to a zero point in the measurement system is assured by including a second photodetector that measures a retroreflected signal. The system is then “zeroed” on the retroreflected signal such that the subsequent measurements recorded by the first photodetector are a precise measurement of the grating period.