The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 16, 2001
Filed:
Jan. 05, 1999
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
A ferroelectric capacitor electrode contact structure comprising an insulator (,) placed over a substrate (,), the insulator (,) containing a source plug (,) and a drain contact (,). An upper plug layer (,) is place over and electrically connected to a drain contact (,). A multi-component oxide layer (,) is placed over an upper plug layer (,). A bottom electrode (,) is placed over a multi-component oxide layer,. Multi-component oxide layer (,) prevents the silicidation of the bottom electrode (,) of a ferroelectric capacitor electrode contact structure while surprisingly maintaining an ohmic contact from the substrate (,) through the drain contact (,) through the upper plug layer (,) through the multi-component oxide layer (,) to the bottom electrode