The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 16, 2001
Filed:
Mar. 06, 2001
Applicant:
Inventors:
Hans-Juergen Engelmann, Dresden, DE;
Beate Volkmann, Freiberg, DE;
Ehrenfried Zschech, Moritzburg, DE;
Assignee:
Advanced Micro Devices Inc., Austin, TX (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/166 ;
U.S. Cl.
CPC ...
H01L 2/166 ;
Abstract
A method is provided for preparing a sample for cross-section analysis by a transmission electron microscope. Semiconductor samples containing recessed portions or unfilled structures are filled with a filling material so as to produce a planar top surface onto which a metal layer can be deposited for thinning the sample to a thickness of less than 100 nm by an FIB technique.