The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 09, 2001
Filed:
Oct. 27, 1998
Applicant:
Inventor:
Kazumasa Sunouchi, Yokohama, JP;
Assignee:
Kabushiki Kaisha Toshiba, Kawasaki, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/701 ; H01L 2/712 ;
U.S. Cl.
CPC ...
H01L 2/701 ; H01L 2/712 ;
Abstract
The present invention simplifies a manufacturing process by performing contact hole formation in a single step even in manufacturing a device having a self alignment contact. A cap layer having a contact portion is formed in a self alignment manner on a gate electrode formed on a silicon substrate. After a SiO,interlayer film is deposited on the cap layer and the silicon substrate, the patterning of a contact hole is performed. Thereafter, a wiring layer is formed in the contact hole. The diameter of the contact portion is formed differently from the diameter of the contact hole.