The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 09, 2001
Filed:
Oct. 13, 1999
Shigeru Ikeda, Tokyo, JP;
Hiroyuki Funatsu, Tokyo, JP;
Oki Electric Industry Co., Ltd., Tokyo, JP;
Abstract
A pellicle is mounted onto a mask that express a wafer, by pressing the pellicle to the mask using a mounting system. The pellicle includes a pellicle membrane, and a pellicle frame including a first portion on which the pellicle membrane is attched and a second portion by which the pellicle mounting system establishes contact therewith. A distance between a surface of the first portion and the surface of the mask may be equivalent to a distance between a surface of the second portion and the surface of the mask. The second portion may have a mechanism for prevention the pellicle mounting system from slipping thereon in a direction parallel to the surface of the mask. The pellicle frame may include a contact portion that has an inclined surface that guides the pellicle mounting system to be in contact with the pellicle frame.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile