The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 09, 2001
Filed:
Jun. 10, 1999
Charles H. Applegarth, San Luis Obispo, CA (US);
SAES Pure Gas, Inc., San Luis Obispo, CA (US);
Abstract
The present invention provides a method and apparatus to purify various gases utilizing the superior performance a heated getter process in a smaller package than previous multiple stage, heated getter processes. The smaller package includes inner and outer enclosures, and an integral, regenerative heat exchanger to simultaneously increase heater efficiency and cool the purified gas. The invention also includes a particle filter to remove particles from the gas flow. The invention further provides an interface to various modular gas stick substrate designs with an inlet and an outlet in one end of the integrated heated getter purifier system. The inlet gas is preheated by the integral heat exchanger and then heated to operating temperature of 200-400° C. The heated getter removes various impurities from the gas. The heated gas is then cooled in the integral heat exchanger. The cooled gas is exposed to a second quantity of cooler getter to remove residual impurities. The gas is then, preferably, filtered to remove particles before releasing to be utilized in semiconductor processing and integrated circuit device manufacturing and other industries.