The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 02, 2001

Filed:

Dec. 03, 1998
Applicant:
Inventors:

Yusaku Ono, Tokyo, JP;

Koichi Moriizumi, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06F 7/60 ; G06F 1/710 ; G03F 9/00 ; G03C 5/00 ;
U.S. Cl.
CPC ...
G06F 7/60 ; G06F 1/710 ; G03F 9/00 ; G03C 5/00 ;
Abstract

A correction target edge extracting part of a layout pattern data correction apparatus extracts a correction target edge from circuit layout patterns. A density calculation region setting part of the apparatus sets density calculation regions around the center of the correction target edge. An area density calculating part calculates an area density of design patterns within the density calculation regions. Given the area density thus calculated, a correction pattern size calculating part calculates the size of a correction pattern to be superposed on the correction target edge. In accordance with the calculated size, a correction pattern generating part generates the correction pattern. A graphic calculating part adds up the correction pattern and design layout patterns to generate corrected layout patterns.


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