Temperature sensor and method of manufacturing the same

Abstract

A low cost high-performance temperature sensor that can be manufactured of a thin-film temperature detecting element with high yield. The temperature sensor has a metal cylinder (,); a ceramic substrate (,) placed in the metal cylinder and a temperature detecting element (,) and film electrodes (,) connected with the output of the temperature detecting element (,); an inorganic filer (,) for absorbing stress to hold the ceramic substrate (,) inside the metal cylinder (,); and a cap (,), provided on one end of the metal cylinder (,), for protecting the temperature detecting element (,) on the ceramic substrate (,). One end of the ceramic substrate is fixed to a first end of a terminal (,) which is U-shaped, and the terminal includes an expansion and contraction absorbing portion (,) between a first and second end.