The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 02, 2001
Filed:
Jun. 22, 2000
Applicant:
Inventors:
Tak K. Wang, Havertown, PA (US);
Clayton E. Law, Malvern, PA (US);
Assignee:
Agilent Technologies, Inc., Palo Alto, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 4/108 ;
U.S. Cl.
CPC ...
H01L 4/108 ;
Abstract
An actuator assembly having a first and a second stack of piezoelectric materials having electrode layers connecting the stacks to a voltage source. A cavity is defined within said first stack and is adapted to receive a first end of the second stack. A first opening and a second opening are defined within the stack wherein each is in fluid communication with the cavity and wherein the first opening has a flat surface within the cavity. A flat face opposite the first opening forms a contact seal with the flat surface. The first and second stacks are adapted to unseal the face from the surface in response to a voltage.