The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 02, 2001
Filed:
Oct. 16, 2000
Michikazu Matsumoto, Kyoto, JP;
Takehiro Hirai, Shiga, JP;
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Abstract
A semiconductor fabrication control monitor includes a first conducting film having a first area, a second area, a third area and a fourth area mutually connected, a first electrode, a second electrode, a third electrode and a fourth electrode all formed on a semiconductor substrate. The first electrode is formed from a second conducting film formed above the first area with an insulating film sandwiched therebetween. The second electrode is formed from the second conducting film formed above the second area with the insulating film sandwiched therebetween. The third electrode is formed from the second conducting film formed above and in direct contact with the third area. The fourth electrode is formed from the second conducting film formed above and in direct contact with the fourth area. The first electrode and the second electrode are mutually connected through a connecting part of the second conducting film, and are electrically connected to the first conducting film.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile