The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 02, 2001
Filed:
Mar. 01, 2000
Hitachi, Ltd., Tokyo, JP;
Abstract
For providing a method and an apparatus thereof, wherein a thin semiconductor wafer is cut out into a unit of a thin semiconductor element under the condition of being stuck on an adhesive sheet, a group of the semiconductor elements are removed from the adhesive sheet at high speed without injuring and breaking each semiconductor element thereof, and the semiconductor elements are picked up from the removed group of the semiconductor elements by a predetermined unit, according to the present invention, the separating method comprising: a separation step for holding on a chuck a group of semiconductor elements with positioning objects, being stuck on an adhesive sheet fixed on a frame at periphery thereof under condition of a semiconductor wafer and cut into a unit of a semiconductor element, for cutting the adhesive sheet around the group of semiconductor elements being held, and for striping the cut adhesive sheet from said group of semiconductor elements being held; and a storing step for storing into a tray, for picking up the semiconductor elements by a desired unit thereof from the group of semiconductor elements being stripped with the adhesive sheet in said separation step and held on the chuck, so as to store into a tray.