The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 02, 2001
Filed:
Oct. 05, 1999
Atsuo Hattori, Hamamatsu, JP;
Yamaha Corporation, , JP;
Abstract
A gate film made of conductive material is formed on a substrate, and a resist pattern having an opening with a predetermined shape is formed on the gate film. The resist pattern is reflowed to make the opening have a tapered shape. By using the resist pattern having the taper shaped opening, the gate film and substrate are anisotropically etched to form a taper shaped opening through the gate film and in the substrate to some depth. After the left resist pattern is etched and removed, the first sacrificial film is formed covering the gate film and substrate with the opening to thereby form an emitter film of conductive material on the first sacrificial film. Unnecessary portions are etched and removed to expose the emitter and gate film and complete a field emission element.