The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 02, 2001
Filed:
May. 01, 1995
Applicant:
Inventors:
Gerhard Steiniger, Ronneburg, DE;
Rainer Ludwig, Hösbach, DE;
Gerd Hoffmann, Bruchköbel, DE;
Assignee:
Balzers und Leybold Deutschland Holding AG, Hanau, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 1/430 ;
U.S. Cl.
CPC ...
C23C 1/430 ;
Abstract
A pure metal is vaporized in a receiver, and a quantity of oxygen slightly substoichiometric for the oxide is introduced. To determine the thickness of the layer deposited on the film and to control the vaporization rate, optical sensors are installed in an area where the layer, because of the presence of unoxidized metal, has sufficient absorption for optical measurement. After the determination of the transparency by the sensors, the layer is subjected to a secondary oxidation process.