The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 25, 2001
Filed:
Dec. 27, 1996
Applicant:
Inventor:
Gen Nakamura, Utsunomiya, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03B 2/754 ; G03B 2/742 ; G03B 2/752 ;
U.S. Cl.
CPC ...
G03B 2/754 ; G03B 2/742 ; G03B 2/752 ;
Abstract
An exposure apparatus includes a light supplying device for supplying exposure light, an optical system for directing the exposure light to a substrate to be exposed, a cover for covering a predetermined portion of the optical system, a gas supply device for supplying an inert gas to the inside of the cover, a detector for detecting a quantity of the inert gas inside the cover and a controller for controlling the light supplying device on the basis of an output of the detector.