The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 25, 2001

Filed:

Feb. 22, 2000
Applicant:
Inventors:

Igor Bol, Sherman Oaks, CA (US);

Iftikhar Ahmed, Bellflower, CA (US);

Assignee:

International Rectifier Corp., El Segundo, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/128 ;
U.S. Cl.
CPC ...
H01L 2/128 ;
Abstract

A single mask process for manufacture of a FRED employs a thick oxide layer over an N type silicon surface and a thin nitride layer over the oxide. A single mask defines FRED device spaced P diffusions. The oxide spanning the P diffusions is laterally etched away, under the nitride layer to expose the surface of adjacent P diffusions and the spanning N type silicon surface. All nitride is then removed and a top contact layer of aluminum is applied atop the silicon surface, contacting a P guard ring diffusion; the surface of the P diffusions defining PN junctions; and the top of the N silicon to define a Schottky diode contact.


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