The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 18, 2001
Filed:
May. 30, 1997
YouLing Lin, Plano, TX (US);
A. Kathleen Hennessey, Lubbock, TX (US);
Ramachandra R. Katragadda, Irving, TX (US);
Ramakrishna Pattikonda, Dallas, TX (US);
Rajasekar Reddy, Dallas, TX (US);
C. Rinn Cleavelin, Lubbock, TX (US);
Howard V. Hastings, II, Lubbock, TX (US);
Wan S. Wong, Dallas, TX (US);
Other;
Abstract
A system and method allow for associating a descriptive label with an anomaly on a manufactured object, such as a semiconductor wafer. The method includes placing the manufactured device on a moveable stage; capturing and preparing a digital-pixel-based representation of the image; symbolically decomposing the digital-pixel-based representation of the image to create a primitive-based representation of the image; analyzing the primitive-based representation of the image to detect and locate the anomaly; isolating primitives associated with the anomaly; comparing the isolated primitives associated with the anomaly with primitives in a knowledge base to locate a set of primitives in the knowledge base most like the isolated primitives associated with the anomaly; and assigning a label associated with the set of primitives in the knowledge base that was most similar to the isolated primitives associated with the anomaly. Different layers of semiconductor wafer may be analyzed to determine an appropriate label for a defect.