The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 18, 2001
Filed:
Jun. 24, 1999
Applicant:
Inventors:
Tomohiro Okumura, Kadoma, JP;
Shozo Watanabe, Katano, JP;
Assignee:
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 7/24 ;
U.S. Cl.
CPC ...
H01J 7/24 ;
Abstract
A high frequency coupler wherein a section of the high frequency coupler cut by a plane perpendicular to a straight line which connects the center of a joint surface between the coupler and an output portion of a matching circuit and the center of a joint surface between the coupler and the antenna has a configuration such that the section contains a plurality of line segments arranged radially from a point adjacent the center of the section. This arrangement enables the flow of currents having good symmetry, uniform distribution of currents flowing on antenna, and uniform plasma generation.