The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 18, 2001
Filed:
Jun. 04, 1999
Applicant:
Inventors:
P. C. Chuang, Hsinchu, TW;
Tsung-Lin Lu, TaiNan, TW;
Gary Kuan, Hsinchu, TW;
Hunter Chuang, Hsinchu, TW;
Assignee:
Utek Semiconductor Corporation, Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 4/014 ;
U.S. Cl.
CPC ...
H01J 4/014 ;
Abstract
A slit valve with safety detect device to prevent clipping, used to reduce the wafer damaged by the slit valve of the seal plate, further to have the function of the safety interlock and cost down the production. This invention mainly includes a plurality of sensor to detect that whether something in the range of the seal plate moving or not. The sensor consisted of an emitter and a receiver for detecting. If there are something in the range, the moving seal plate will stop moving, avoid the wafer damaged by the seal plate and to cost down.