Multi-layer ink jet print head and manufacturing method therefor

Abstract

An ink jet print head is disclosed which includes a flow path unit with nozzles, a pressure generating unit disposed on the flow path unit and having ink pressure chambers formed behind the respective nozzles, and piezoelectric/electrostrictive elements each disposed on a wall defining a corresponding ink pressure chamber, for deforming the wall to change a pressure of the ink pressure chamber, whereby the ink in the ink pressure chamber is jetted through the corresponding nozzle. The pressure generating unit includes a spacer plate having windows which closed by a closure plate and a connecting plate disposed on the spacer plate, so as to give the respective ink pressure chambers. The connecting plate has communication holes through which the ink pressure chambers communicate with the nozzles. The spacer plate, closure plate and connecting plate are formed from respective ceramic green sheets, which are laminated on each other and fired into an integral ceramic structure as the pressure generating unit. The piezoelectric/electrostrictive element includes a pair of electrodes and a piezoelectric/electrostrictive layer, which are formed by a film-forming method on an outer surface of the closure plate.