The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 18, 2001
Filed:
Nov. 26, 1999
Applicant:
Inventors:
Assignee:
CKD Corporation, Komaki, JP;
Primary Examiner:
Int. Cl.
CPC ...
G01L 7/00 ;
U.S. Cl.
CPC ...
G01L 7/00 ;
Abstract
In a vacuum pressure control system, the vacuum pressure in a reaction chamber,is measured by vacuum pressure sensors,and,(S,), the measured value is changed at a set vacuum pressure changing speed commanded from the exterior or determined and stored in advance in a controller of the system (S,). The changed value is sequentially generated as an internal command. In response to the sequentially generated internal commands, a desired value of the feedback control is changed in sequence (S,), so that the feedback control is executed as follow-up control (S,). Accordingly, the vacuum pressure in the reaction chamber,can be uniformly changed to a desired vacuum at a set vacuum pressure changing speed.