The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 11, 2001
Filed:
Jan. 04, 1999
Allen S. Yu, Fremont, CA (US);
Paul J. Steffan, Elk Grove, CA (US);
Thomas C. Scholer, San Jose, CA (US);
Advanced Micro Devices, Inc., Sunnyvale, CA (US);
Abstract
A method of manufacturing semiconductor wafers using electroless plating processing. A partially completed semiconductor wafer having trenches and vias formed in a layer of interlayer dielectric has a barrier layer globally formed on the surface of the partially completed semiconductor wafer. A seed layer is globally formed on the surface of the barrier layer. The barrier and seed layers are removed from portions of the surface of the partially completed semiconductor wafer on which plating is not to occur. The partially completed semiconductor wafer is then subjected to an electroless plating process and conductive material is plated on those portions of the seed layer that remains on the partially completed semiconductor wafer.