The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 11, 2001
Filed:
Feb. 27, 1998
Dominic Gerard Pelletier, Groveland, MA (US);
Nis Krauskopf, Gloucester, MA (US);
Scott James Gregory, Gloucester, MA (US);
Innovent, Inc., Peabody, MA (US);
Abstract
A collimator filter for a physical vapor deposition apparatus useful for coating semiconductor wafers includes a plurality of corrugated ribbons attached at abutting double-walled nodes by resistance spot welding. The nodes are sealed by application of a braze material to diverging wall portions of the nodes by extrusion or spraying, followed by heating in a vacuum furnace. Alternatively, the nodes may be sealed by application of a braze material foil to a top and a bottom surface of the collimator followed by heating in the vacuum furnace. By sealing the nodes, a significant reduction may be achieved in outgassing and generation of particulate contaminants.