The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 11, 2001
Filed:
Nov. 29, 1999
Shigeru Namiki, Kadoma, JP;
Hidetoshi Kawa, Ibaraki, JP;
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Abstract
The chamber,of the spattering apparatus has a gas introduction port,provided at one side in a direction orthogonal to the opening/closing direction of a door,of chamber,, and a vacuum evacuation port,provided on the other side of chamber. A substrate holder,is fixed on door,, and a cathode,is arranged on a wall face facing door,of chamber,. A shield,is arranged in close proximity to and so as to cover the peripheral part of substrate holder,. A hole,is formed in shield,in a location facing vacuum evacuation port,, whereby rapid vacuum evacuation can be achieved even though shield,is arranged in a condition close to sealing with respect to the peripheral part of substrate holder,.