The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 04, 2001
Filed:
Sep. 14, 1999
Applicant:
Inventors:
Hiroyuki Kondo, Tsukuba, JP;
Noriaki Kandaka, Kawasaki, JP;
Assignee:
Nikon Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G21K 5/00 ;
U.S. Cl.
CPC ...
G21K 5/00 ;
Abstract
A soft X-ray source includes a mirror having a focal point, the mirror being one of parabolic and ellipsoidal, a nozzle delivering a target material to a plasma generation point substantially coincident with the focal point, and a laser source delivering a pulsed laser beam to the plasma generation point, wherein a plasma is generated at the plasma generation point upon irradiation by the pulsed laser beam, the plasma emitting soft X-rays that are formed into beams by the mirror, the beams being parallel if the mirror is parabolic and converging if the mirror is ellipsoidal.