The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 04, 2001
Filed:
Jul. 26, 1999
Applicant:
Inventor:
Takao Ukaji, Utsunomiya, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 1/102 ;
U.S. Cl.
CPC ...
G01B 1/102 ;
Abstract
An exposure apparatus includes a projection optical system, a barrel supporting member for supporting the projection optical system, a stage being movable relative to the projection optical system, a base for supporting the stage, a base measuring system for measuring at least one of a position and a displacement of the base with respect to the barrel supporting member, and a stage measuring system for measuring at least one of a position and a displacement of the stage with respect to the barrel supporting member.