The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 04, 2001
Filed:
May. 13, 1999
Applicant:
Inventors:
Armin Splett, Ulm, DE;
Dieter Emmer, Starnberg, DE;
Assignee:
Siemens Aktiengesellschaft, Münich, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 1/508 ; H01Q 3/24 ; H01L 4/108 ; H01L 4/120 ; G02B 2/608 ;
U.S. Cl.
CPC ...
G01P 1/508 ; H01Q 3/24 ; H01L 4/108 ; H01L 4/120 ; G02B 2/608 ;
Abstract
The resonant circuit has at least one resonant body of a semiconductor material anchored on the surface of a semiconductor substrate, at least one first electrode being arranged at said semiconductor material, and at least one second electrode. The first and second electrode are arranged lying opposite one another. When an AC-superimposed DC voltage is applied between the first and the second electrode, the resonant body is excited to mechanical oscillation by the DC voltage. In particular, the resonant circuit can be monoically integrated in electronic circuits.