The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 28, 2001
Filed:
Aug. 31, 1999
Applicant:
Inventors:
Michio Kadota, Kyoto, JP;
Tsuyoshi Iwamoto, Kyoto, JP;
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 6/10 ;
U.S. Cl.
CPC ...
G02B 6/10 ;
Abstract
An acousto-optic deflector which has a thin film waveguide layer on a buffer layer formed on a substrate and an IDT and light incidence/emergence means on the thin film waveguide layer. As the thin film waveguide layer, a piezoelectric material such as a ZnO film is used. As the substrate, a material with a resistivity of not more than 20 &OHgr;cm is used. Sezawa waves are excited on the thin film waveguide layer by the IDT, and a laser beam traveling in the thin film waveguide layer is deflected by the Sezawa waves. If the ZnO thin film waveguide layer has a thickness of h and if the excited Sezawa waves have a wavelength of &lgr;, 0.2<h/&lgr;<0.5 is fulfilled.