The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 28, 2001

Filed:

Mar. 04, 1998
Applicant:
Inventors:

Koichi Nitta, Yokohama, JP;

Haruhiko Okazaki, Yokohama, JP;

Tokuhiko Matsunaga, Yokohama, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 3/300 ; H01L 2/348 ;
U.S. Cl.
CPC ...
H01L 3/300 ; H01L 2/348 ;
Abstract

An electrode of a metal, which is one of Group IV and VI elements, is deposited on an n-type In,Al,Ga,N layer. Alternatively, after an electrode material of carbon, germanium), selenium, rhodium, tellurium, iridium, zirconium, hafnium, copper, titanium nitride, tungsten nitride, molybdenum or titanium silicide, is deposited on an n-type In,Al,Ga,N layer or a p-type In,Al,Ga,N layer, an impurity for increasing the carrier concentration of the semiconductor layer is ion-implanted, and the annealing is carried out. Thus, it is possible to provide a light emitting semiconductor device, which has a low contact resistance and a sufficient bond strength to the In,Al,Ga,N layer while maintaining the crystallinity of the In,Al,Ga,N layer.


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