The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 28, 2001
Filed:
Jul. 09, 1999
David Blau, Cupertino, CA (US);
Elia Jadushlever, Foster City, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A calibration current source and methods of calibrating temperature measurements made during, e.g., an RTP process are described. The calibration current source preferably includes a biasing circuit, an output transistor current source, and an offset circuit. The biasing circuit has an input, a reference voltage output and a biasing voltage output. The output transistor current source is coupled to the biasing voltage output and is configured to produce an output current. The offset circuit is coupled in a feedback loop between the reference voltage output and the biasing circuit input and is configured to generate from the reference voltage output a variable offset voltage for selectively controlling the biasing voltage applied to the output transistor current source. In a temperature calibrating method a calibration table is generated by applying a plurality of input signals to a calibration current source to produce a plurality of output signals. The calibration table is stored. When an output signal of a photodetector is received the calibration input signal corresponding to the received photodetector output signal is determined based upon the stored calibration table.