The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 21, 2001
Filed:
May. 29, 1998
Edward A. Johnson, Bedford, MA (US);
Theodore F. Morse, Providence, RI (US);
Other;
Abstract
A fiber optic reflectometer employs an optical fiber near a target substrate in a deposition chamber. The optical fiber is positioned within the chamber so that deposition of a thin film on the substrate also occurs on a portion of the optical fiber. A combination of monochromatic and broadband white light is transmitted through the optical fiber to the film deposited on it, and light reflectance measurements are made to determine, in situ and substantially in real time, such characteristics of the film as its growth rate, thickness, composition, surface roughness and refractive index. Such measurements can be made without bulk optics and without the precise alignment requirements of ellipsometry techniques and apparatus.