The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 21, 2001
Filed:
Mar. 20, 2000
Thomas Bever, München, DE;
Stephan Schmitt, Kaufering, DE;
Günter Ehrler, Holzkirchen, DE;
Infineon Technologies AG, Munich, DE;
Abstract
The invention relates to a semiconductor sensor having a base element (,) and at least one deformation element (,). The deformation element (,) is composed of a semiconductor substrate that is doped with a dopant of a first conductivity type. Piezoresistors (,) that are doped with a dopant of the opposite conductivity type are located in the deformation element (,). The deformation element (,) has at least one part that is in contact with a medium. The semiconductor sensor is characterized in that the part has a lower concentration of the dopant than a further region located between it and the piezoresistor (,).